• 2010 Sumitomo Heavy Indus SWA-90GD Sumitomo Laser Anneal

    • Manufacturer: Sumitomo
    • Number of Units: 1

    the main function of this system is to rapidly anneal semiconductor substrates using laser beam energy in order to recover defect crystals generated by pre-process such as ion implantation.the system is composed ...

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    Regensburg, Germany