- Morrisville, PA
- $25,000 USD
- In-Line Diffusion Furnace System - New, Neve Installed
New, never installed!
BTU Conveyor Furnace BTU Standard TFQ Series
In-Line Diffusion Furnace with 36" wide belt, quartz plate construction (Top & Bottom),
quartz tubes for belt support, a Gas-TightCase and with 16 zones.
(384" of Heated Length).
Throughput - 1500 per hour (minimum based on 156 mm square wafers loaded 5 abreast);
Yield Loss -Breakage95%;
Wafer Thickness - 175 - 350 Microns;
option 150 microns;
Product Size Range - up to and including 210 mm sq;
MTBF - 5800 Hours; MTTR
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