12 - inch ( 300mm

12 - inch ( 300mm ) HFCVD System for CVD Diamond & Related Materials in Sterling, MA

Sterling, MA


specially featured
Semiconductor Equipment
Documentation includes selected hardcopy and electronic CAD drawings.
Number of units:
Power requirements:
3 Phase


Hot Filament CVD system engineered for diamond deposition on a 12 inch (~300mm) rotary platen.
Design offers excellent potential for diamond, CNTs & related nanomaterials processing for both R&D and/or production.
This equipment was engineered and used by an industrial entity for commercial CVD production using a hydrogen-based process. 2-chamber system design includes loading chamber and HFCVD hot zone separated by large gate valve. This design enables continuous operation of filaments for many days without shutdown. Equipment employs a 4-zone filament array with independent controls for each zone. Rotary stage maximizes deposition uniformity. Large HFCVD hot zone and push rod design enable substrate-to-filament distance control. Refractory metal filaments can operate at >2000C and enable thermal decomposition of H2 and hydrocarbons into activated species. Specialty, water-cooled MDC chambers maintain low temperature chamber wall while substrate is heated to elevated temperatures via atomic hydrogen recombination and radiational heating.
Deposition over >12 inch diameter or coating on 3-D shapes should be viable with process and fixture development.
Images of a typical HFCVD system installation are attached.
12-inch (300mm) HFCVD System
Cline Innovations offers experience with activated CVD of carbon based materials dating back to 1989 including roles in academia and industry.
Please don't hesitate to contact Cline Innovations to confidentially discuss your research or industrial application interests.
US Export Controls may apply.