- Semiconductor Equipment
- 206-C shutdown controller. Multi Gas Controller with 2 HF readouts. 2 HF detectors/transmitters including daily Auto-Test functionality. Spectra Gases regulator panel(s) for F2 premix. Shutdown interlocks for F2 premix including UHP pneumatic line (NC) and magnetic FV4-VR4 flow valve. Spectra Gases regulator panel(s) for inert gases. Exhaust flow interlock. Sprinkler head (un-used to date). Bottle mounting hardware and straps. Filtered make-up air vents. Lockable doors(s) and flaps(2). Related documentation and manuals. Spare parts, as negotiated.
- Condition info:
- Very Good
- Number of units:
- Laser based tools
- Lasers & related equipment
- Subcategory 2:
- Wafer fabrication equipment
Model 206-C Spectra Gases PLC Control with spares available.
Multi Gas Controller set up with two HF transmitters, but other gas options exist from Linde.
Removable gas panels equipped with both F2 Premix and inert regulators.
Past use for excimer laser in semiconductor industry.
Limited controller and sensor/actuator testing has been performed.
3 Bottle Gas Cabinets
Original specification for inert panels includes Argon, Helium, Xenon, Krypton, and Rare Gas (excimer).
All/most panels include purge bypass and other features.
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