- Semiconductor Equipment
- Other associated components are not included. However, the items shown (or equivalent) may be available including Precision Power Detector (p/n FI20164-1 shown in photo), cables, etc.
- Number of units:
- Amat application:
- AMAT TUNER 1/4-GUIDE WL 2.45GHZ 3KW 3-STUB.
- Plasma processing eq
- Wafer fabrication equipment
- Subcategory 2:
- Plasma processing equipment and tools
3-stub automated tuner produced by Astex (MKS Instruments) for use with SmartPower microwave generators.
This is a WR284 waveguide component.
3kW SmartMatch microwave tuner
AMAT Application: AMAT TUNER 1/4-GUIDE WL 2.45GHZ 3KW 3-STUB.
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