PlasmaQuest 6" Load-Lock Microwave-ECR Plasma

PlasmaQuest 6" Load-Lock Microwave-ECR Plasma etch system in Sterling, MA

Location:
Sterling, MA
Manufacturer:
PlasmaQuest
Model:
6" Load-Lock

Specifications

Condition:
used
Serial number:
YES
Note:
specially featured
Process:
Etch, PECVD potential
Division:
Semiconductor Equipment
Number of units:
1
Number of gas inputs:
Eight Gas
Wafer size range; maximum:
150 mm

Description

PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancment of microwave plasma.
ECR operation in mTorr pressure range yields large area plasma processing capabilty for planar and low profile parts.
Currently equipped with 1000W Astex microwave delivery system (AX2110 or equivalent).
Configured with 2 modules including power & controls rack and vacuum module.
System to be rebuilt to meet specific customer for needs for etch and/or PECVD processing.
Computer controller may function, but upgrade likely to be best option.