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2003 Peter Wolters AG PM300 Apollo Peter Wolters in Regensburg, Germany

Location:
Regensburg, Germany
Manufacturer:
Peter Wolters AG
Model:
PM300 Apollo

Specifications

Condition:
used
Year:
2003
Note:
specially featured
Weight:
24,250 lb (11,000 kg)
Division:
Semiconductor Equipment
Ce marked:
YES
Condition info:
Very Good
Controller type:
PLC Controller Type
Number of units:
1
Platen diameter:
35.43 in (89.99 cm)
External cooling:
Water Cooled
Pad conditioning:
Between Runs
Number of platens:
2
Power requirements:
440 V 100.0 A 50 Hz 3 Phase
Cassette to cassette:
YES
End of process detection:
Other
Main polishing tables 1+2:
Diameter 900 mm; Rotating speed 0 - 125 rpm;
Wafer size range; maximum:
300 mm
Wafer size range; minimum:
300 mm
Exterior dimensions; depth:
62.992 in (160.0 cm)
Exterior dimensions; width:
280.315 in (712.0 cm)
Wafer size range; set size:
300 mm
Exterior dimensions; height:
86.614 in (220.0 cm)
Recirculating chiller; chiller included:
YES
Category:
Cmp polishers

Description

300mm;two side / chambers; dry in dry out; 2 step polishing; with touch-up platen;
Polishing head: Wafer diameter 300 mm; Rotating speed 0 - 125 rpm; Backside pressure 0 - 200 kPa; Polishing downforce 300 - 4000 N
Main polishing tables 1+2: Diameter 900 mm; Rotating speed 0 - 125 rpm;
Temperature control 20 - 60 °C (Chiller);End Point Detection Motorcurrent
Secondary polishing table: Diameter 430 mm; Rotating speed 0 - 125 rpm; Temperature control 20 - 60 °C (Chiller)
Pad conditioner:Down force 0 - 350 N Disc diameter 120 mm Rotating speed 0 - 80 rpm High pressure conditioning 0 - 100 bar
SECS II / GEM, CIM