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1995 IPEC/Westech AVANTI 472 Westech in Regensburg, Germany

Location:
Regensburg, Germany
Manufacturer:
IPEC/Westech
Model:
AVANTI 472

Specifications

Condition:
used
Year:
1995
Note:
specially featured
Weight:
7,302 lb (3,312 kg)
Division:
Semiconductor Equipment
Condition info:
Good
Number of units:
1
Pad conditioning:
None
Number of platens:
2
Cassette to cassette:
YES
End of process detection:
None
Wafer size range; maximum:
200 mm
Wafer size range; minimum:
200 mm
Exterior dimensions; depth:
198.000 in (502.9 cm)
Exterior dimensions; width:
66.535 in (169.0 cm)
Exterior dimensions; height:
228.000 in (579.1 cm)
Category:
Cmp polishers

Description

200 Wafer Size Single Wafer Polishing; Polish Arm/Wafer Carrier; Load/Unload Station; Primary/Final Polish Table (22.5"/20.625"); Carrier Clean Station; APP1000 Pad Conditioner; Adjustable Parameters: Polish Arm Downforce and Backpressure; Polish Platen Rotational Speed; Polish Platen Temperature; Wafer Carrier Assembly Rotation Speed; Polish Arm Assembly Oscillation Speed and Distance; Slurry Pump Output; APP1000 Pad Profiling; Alarm Band Width, NOVAScan 210 ITM system (inline measuring system) for installation inside the unload water track,