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load-locked electron beam evaporator with substrate heaters. used thin film deposition system. this fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw dista...
model simba 2, s# 133, schematics/manual 0101-8234-2, part # 0040-3620-1, 208 vac 3ph 70 amps 50/60hz
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