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e-beam thin film evaporator with substrate heaters and deposition rate controller. used thin film deposition system. system has a load lock for fast cycling or wafers. water cooled stainless steel ...
model simba 2, s# 133, schematics/manual 0101-8234-2, part # 0040-3620-1, 208 vac 3ph 70 amps 50/60hz