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cassette to cassette uv flood exposure system. system includes a uv light source, intensity controlling power supply and robotic substrate handling subsystem. pc controller. 500w nuv lamp house: 36...
oai 2000-005-02 flood exposure oai flood exposure tool 208v l/s watt= 500 nuv ser number 1020
c116505 oai optical associates inc. j500/vis mask aligner condition: for parts or not working