Location:
Freehold Township, NJ
Price:
$11,000 USD
Manufacturer:
Semitool STI
Model:
870ST

Specifications

Condition:
used
Stock number:
58333
Subcategory:
Cleaning systems

Description

Spin Rinse Dryer for Wafer or Substrate Cleaning. Spin rinser dryer dry to dry system with on-axis horizontal rotor. System uses DI water spray and heated N2 to clean substrates as a full cassette rotates inside chamber. Currently configured with rotors for 5 in. wafer cassettes. Size can be changed for additional charge. 328 style controllers. Unit does not have resistivity monitors. 120V, 50/60 Hz.