- Freehold Township, NJ, USA
- Semitool STI
Spin Rinse Dryer for Wafer or Substrate Cleaning. Spin rinser dryer dry to dry system with on-axis horizontal rotor. System uses DI water spray and heated N2 to clean substrates as a full cassette rotates inside chamber. Currently configured with rotors for 5 in. wafer cassettes. Size can be changed for additional charge. 328 style controllers. Unit does not have resistivity monitors. 120V, 50/60 Hz.
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