- Freehold Township, NJ, USA
- Particle Measuring
- SAS 5800
Surface Analysis Particle Measuring System. Sizes and locates surface contamination and defects down to 0.10 micro-meters (PSL reference) in a fully automated 100mm - 200mm, cassette to cassette operation. The SAS 5800 includes teo polarized HE-NE Lasers which provide independent S and P polarization analysis. The contamination and defects are assigned as point, line and area defects. Accept/reject criteria is based on particle, scratch, area defect and STS (surface roughness).
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