- Freehold Township, NJ, USA
- $8,500 (USD)
- SAT 4060D
Spray Acid Tool. Previously used with BOE/Glycol. Configured for 5 in. and 6 in. wafers, wafer size can be changed by replacing rotors. Four heated tanks and bulk fill capability. DI water and N2 for cleaning. Graphical display with membrane data entry keypad, 3-1/2 in. floppy drive, multi-recipe. Sold As Is.
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