- Freehold Township, NJ, USA
- Stock number:
- Evaporators in United States
4 Pocket E-Beam Evaporator Upgraded by TES. Used thin film deposition system. Inficon XTC/2 crystal deposition monitor/controller. Three dome planetary configuration for 3 in. wafers. Rotation control. All system components mounted in cabinet except cryo compressor. CTI cryopump compressor with roughing pump. Auto valve controller. 4 pocket e-gun with turret source selector. Niles Electronics NE-6 E-Beam power supply. X-Y sweep controller. Water cooled 17.5 in. ID bell jar.
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