Location:
Freehold Township, NJ
Price:
$49,000 USD
Manufacturer:
Temescal
Model:
BJD-1800

Specifications

Condition:
used
Stock number:
55702

Description

4 Pocket E-Beam Evaporator Upgraded by TES. Used thin film deposition system. Inficon XTC/2 crystal deposition monitor/controller. Three dome planetary configuration for 3 in. wafers. Rotation control. All system components mounted in cabinet except cryo compressor. CTI cryopump compressor with roughing pump. Auto valve controller. 4 pocket e-gun with turret source selector. Niles Electronics NE-6 E-Beam power supply. X-Y sweep controller. Water cooled 17.5 in. ID bell jar.