Location:
Freehold Township, NJ
Price:
$59,000 USD
Manufacturer:
Temescal
Model:
FC-1800

Specifications

Condition:
used
Stock number:
57605

Description

E-Beam Thin Film Evaporator with Substrate Heaters and Deposition Rate Controller. Used thin film deposition system. System has a load lock for fast cycling or wafers. Water cooled stainless steel bell jar. Currently configured with lift-off dome for 4 in. dia. wafers. Quartz substrate heaters. Automatic or manual valve controls. Crystal film thickness monitor. CV-8 8 kW e-beam power supply with sweep controller. 4 pocket e-gun with pocket selector. Cryopump and roughing pump. Special Price.