Location:
Freehold Township, NJ
Price:
$165,000 USD
Manufacturer:
Unaxis
Model:
BAK EVO (760)

Specifications

Condition:
used
Stock number:
47000

Description

Multiple Source Thermal Evaporator. Used thin film deposition system. Proven modular design box coater system can be easily configured for many applications. Currently configured with 3 shutters and 8 water cooled power feed throughs. 3 Inficon XTC crystal deposition monitors each controlled via Khan computer. Substrate carrier for 8 in. dia. substrates. Khan process control with user friendly graphics. Fully integrated multi-tasking PC-based control system, monitors all process data, manages process recipes with built in failure diagnostics. CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down. Mfg. 2001. Very low hours.