- Freehold Township, NJ, USA
- $19,500 (USD)
- Canon semiconductor equipment
- PLA 600F
150mm Proximity/Contact Mask Aligner. Currently configured for cassette to cassette processing of 150mm wafers. Reduced diffraction optical system. Proximity, soft contact and hard contact printing at the touch of a button. Easy operation from control panel. 250W lamp. Manual alignment. Resolution of 1 micrometers in contact printing and 3 micrometers in proximity printing.
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