- Freehold Township, NJ, USA
- $9,500 (USD)
Deep UV Large Area Exposure System with Mask Alignment Fixturing. 87351 large area deep UV exposure tower with a beam size of 6.0 in. x 6.0 in. Spectral Region: 220nm to 260nm and a flux density of 4 mW cm^-2. Up to 500W maximum. Timer controller and photo feedback controller. Mask alignment fixture with micrometer adjustment control. Currently configured with 5 in. x 5 in. vacuum chuck. Ask salesman about availability of other sizes. 110V, 50/60 Hz, 10A.
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