Location:
Freehold Township, NJ
Price:
$9,500 USD
Manufacturer:
Oriel
Model:
87351

Specifications

Condition:
used
Stock number:
58436

Description

Deep UV Large Area Exposure System with Mask Alignment Fixturing. 87351 large area deep UV exposure tower with a beam size of 6.0 in. x 6.0 in. Spectral Region: 220nm to 260nm and a flux density of 4 mW cm^-2. Up to 500W maximum. Timer controller and photo feedback controller. Mask alignment fixture with micrometer adjustment control. Currently configured with 5 in. x 5 in. vacuum chuck. Ask salesman about availability of other sizes. 110V, 50/60 Hz, 10A.