Location:
Freehold Township, NJ
Price:
$49,000 USD
Manufacturer:
Applied Materials
Model:
DCSXZ300

Specifications

Condition:
used
Stock number:
58916
Subcategory:
Pecvd - oxidation

Description

300mm CVD Chemical Vapor Deposition Chamber. Was installed on a Centura System. MKS Astex Astron 2L remote plasma source. First Dep. Manifold: AR - Pump Purge. AR - 3.0 SLM. SIH4 - 2.0 SLM. DCS - 1.0 SLM. Second Dep. Manifold: WF6 - 20 sccm. AR - 3.0 SLM. AR - Pump Purge. Clean Manifold: NF3 - 1.0 SLM. AR - 3.0 SLM. AR - Pump Purge. Bottom Purge Manifold: AR - 3.0 SLM. Heater Purge Manifold: N2 Heater Purge.