- Freehold Township, NJ, USA
- Thermo semiconductor equipment
- ACCUDOSE 9000
Photospeed Tool Measures Batch to Batch Photospeed Variations. Photoresist testing system. Oriel part 83995 near UV system with fast shutter. Assures that exposure dosage is in-line with your process window requirements. No need to sideline your expensive stepper for photoresist testing. Provides accurate, incremented bulk area exposures across a wafer. Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.
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