Location:
Freehold Township, NJ
Price:
$75,000 USD
Manufacturer:
Plasmatherm
Model:
SLR 720 MF

Specifications

Condition:
used
Stock number:
58579

Description

RIE Reactive Ion Etch System. PC controller with graphical user interface. Single chamber unit with load lock. RF5S 500W, 13.56 MHz RF Generator. Turbo pump with roughing pump. Currently configured with four MFC, others may be added at additional price. 208V, 3 Ph, 60 Hz.