Top Seller
Tegal 803 36279 in Freehold
Location:
Freehold Township, NJ
Price:
$750 USD
Manufacturer:
Tegal
Model:
803

Specifications

Condition:
used
Stock number:
36279

Description

Inline Automatic Plasma Etcher. The Plasma Inline 803 is a fully automatic, microprocessor-based plasma chemistry etcher designed especially for the etching of silicon dioxide (Si02) thin film deposited on single crystal or polysilicon semiconductor wafers. It provides up to four process gases, two process channels and a clean channel. Sold As Is. Does not come with monitor or RF generator.