Location:
Freehold Township, NJ
Price:
$9,500 USD
Manufacturer:
Trion
Model:
MINILOCK

Specifications

Condition:
used
Stock number:
56453

Description

Single Wafer RIE Etcher. LCD display. Load lock with transfer arm. Current substrate carrier for up to 150mm wafers. Five MFC for gas input. Missing RF generator and vacuum pump. Sold As Is.