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ulvac phoenix tool was operational when deinstalled call for moire info
single chamber multiple step rf & microwave plasma asher. production proven resist strip and residue cleaning solution. 120/208v, 3 ph, 50/60 hz, 42a. came out of working environment but did not se...
evg850db/200 wafer debonder for 150mm wafers waferdebonder
lot numer 525331
this was removed from a decommissioned robot and not tested under power. the hands both move easily in and out from their home positions, and the rotation is very smooth and easy.