Location:
Freehold Township, NJ
Price:
$29,000 USD
Manufacturer:
Tencor
Model:
SURFSCAN AIT Model 8010

Specifications

Condition:
used
Stock number:
40884
Subcategory:
Wafer analysis

Description

Advanced In-Line Defect Inspection System. Automated full wafer inspection system for detecting particles as small as 0.10 micro-meters on bare silicon and patterned process wafers. High detection sensitivity even for difficult after-etch, develop, and chemical mechanical polishing. High throughput of up to 30 full wafer scans per hour on 200mm wafers.