- Freehold Township, NJ, USA
- $3,250 USD
- Bay Voltex
Combined Chiller and Heat Exchanger for Applied Materials Etch and CVD. Chiller unit 5 kW with temp. of -15 deg C to +10 deg C. Heat exchanger 28 kW with temp. of 20 deg C to 40 deg C. Flow rate of 4 gpm at 60 psi. Requires house water. 208/230V, 3 Ph, 50/60 Hz, 30A.
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