- Freehold Township, NJ, USA
- Electron Vision
- ElectronCure 30X
E-Beam Photoresist Curing Tool. Capable of exposing large area substrates uniformly at a precision dose. Beam voltage is variable from 5 to 30 kV in 115V steps. The system is computer controlled. Will accommodate standard round silicon wafers or slices from 100mm to 150mm dia. or square plates up to 4 in. x 4 in.
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