Location:
Freehold Township, NJ
Price:
$25,000 USD
Manufacturer:
Electron Vision
Model:
ElectronCure 30X

Specifications

Condition:
used
Stock number:
59929

Description

E-Beam Photoresist Curing Tool. Capable of exposing large area substrates uniformly at a precision dose. Beam voltage is variable from 5 to 30 kV in 115V steps. The system is computer controlled. Will accommodate standard round silicon wafers or slices from 100mm to 150mm dia. or square plates up to 4 in. x 4 in.