- Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Hitachi Metals FCPI 980
- Manufacturer: Hitachi Metals
Manifold set: C4F8*50 SF6*500 N2*200 BCl3*200 ClF3*500 CL2*200 O2*5000 N2*10
Tokyo, Japan- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
HORIBA STEC Stec SEC-7330
- Manufacturer: Horiba
2%Sih4/H2 100sccm Device name: Mass flow controller (MFC)
Tokyo, JapanHORIBA STEC Stec SEC-7330
- Manufacturer: Horiba
2%Sih4/H2 100sccm Device name: Mass flow controller (MFC)
Tokyo, Japan

