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Used cluster in Germany

  • Ulvac

    Ulvac

    • Manufacturer: Ulvac

    Batch type equipment of chemical dry cleaning for remoral of native oxide in Narrow and Deep-contact patterns of advanced semiconductor. Damage-free (remote plasma and low-temperature process) High throughput and...

    Munich, Germany
  • Ulvac

    Ulvac

    • Manufacturer: Ulvac

    Dry etching system for high volume production with good cost performance and wide selection of tool configuration. GaN Recess with selectivity to AlGaN >350 precise etch stop using laser interferometry EPD low da...

    Munich, Germany