New Semiconductors in Japan

LGR-Series

• Manufacturer: TOWA JAPAN

Enables high-precision blade cutting of lead-less device products such as QFN packages. Selectable blade cut(FMS3040-HC) or laser cut(LGR1040) depending on process and lead frame design. Combining dedicated lead ...

HORIBA STEC, Co., Ltd. LG-100 Series

• Manufacturer: Horiba

Laser Gas Analyzer Supporting advanced manufacturing processes for semiconductors through HORIBA’s unique built-in IRLAM infrared gas analysis technology Laser Gas Analyzer LG-100 Series can take real-time measur...

PLATO Series

Photoluminescence Mapping System The PLATO Series, Photoluminescence Mapping System, is a compound wafer defect inspection device utilizing the photoluminescence (PL) method. It can measure spectral characteristi...

HORIBA, Ltd. Xtrology

• Manufacturer: Horiba

Fully Automated Thin Film Inspection System Combines multiple sensors and automation technology to provide increased value for semiconductor wafer inspection The new product, "Xtrology," Fully Automated Thin Film...

MiPLATO-SiC

SiC Wafer Defect Inspection System The SiC Wafer Defect Inspection System MiPLATO-SiC is a PL mapping system optimized for SiC wafers. It acquires the spectrum of the entire wafer in a short time using spiral map...

HORIBA, Ltd. PD10-EX

• Manufacturer: Horiba

Reticle / Mask Particle Detection System Complete particle detection and removal with one machine for enhanced efficiency and yield improvement in semiconductor manufacturing processes Since its launch in 1984, t...

HORIBA, Ltd. PD10

• Manufacturer: Horiba

Reticle / Mask Particle Detection System Next-generation inspection platform to meet future needs PD10 is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platf...

PyroSense Series

more In-Situ Monitoring System The PyroSense Series is an in-situ monitoring system for epitaxial growth processes in MOCVD/MBE. It enables inline monitoring of temperature, film thickness (growth rate), and warp...

PLATO-MicroScan

• Manufacturer: Microscan

Micro Photoluminescence Mapping System PLATO-MicroScan is a microscopic PL mapping system that integrates an objective lens onto the PLATO series platform. This objective lens-based micro photoluminescence mappin...

OPM Series

Optical Property Measurement System OPM Series is a High-Speed Optical Measurement System for Camera Filter Inspection. By automatically exchanging multiple samples and adjusting the incident angle, it measures s...

HORIBA STEC, Co., Ltd. VC Series

• Manufacturer: Horiba

Direct Liquid Injection System The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system. HORIBA can provi...

HORIBA Advanced Techno Co., Ltd. HD-960L

• Manufacturer: Horiba

HF (Hydrofluoric Acid) DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor This is a dissolved oxygen monitor designed for low-flow applications, ideal for monitoring the concentration of di...

HORIBA, Ltd. RP-1

• Manufacturer: Horiba

Reticle/Mask Particle Remover The RP-1 automatically removes particles from the reticle/mask by air (or N2) and vacuum suction. Routinely removing the particles before the lithography process extends the replacem...

HORIBA STEC, Co., Ltd. SEC-8000 F/D/E Series

• Manufacturer: Horiba

High Temperature Digital Mass Flow Controller The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor p...

HORIBA Advanced Techno Co., Ltd. HE-480R

• Manufacturer: Horiba

Resistivity Meter for Semiconductor Cleaning Processes A specific resistance meter ideal for monitoring the purity of ultra-pure water used in cleaning processes. It accurately measures ultra-pure water during pr...