2016 Nexx Apollo PVD
The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafe...
Regensburg, Germany- Regensburg, Germany
1995 CDE CDE80/3 Plasma Etch
- Manufacturer: CDE
The system was in production until February 2025. Plasma Etch
Regensburg, Germany2008 ASM Advance 400
- Manufacturer: ASM
- Model: ADVANCE 400
ASM Furnace Vertical - Advance 400 2 Reactor atmospheric Robot defect and need service
Regensburg, Germany1995 Fusion Systems Inc. 200 PCU
- Manufacturer: Fusion Systems Inc.
Die Anlage war bis zur Deinstallation in Jänner 2024 in Produktion. FUSION 150/7D
Regensburg, Germany2011 Mechatronics Inc TWH 001 06 11
- Manufacturer: Mechatronics Inc
Power requirements: 200-240 V 50/60 Hz 3 Phase | Weight: 1,213 lb (550 kg)
Regensburg, Germany2013 Ismeca KGD01
- Manufacturer: Ismeca
KGD01 NX32W Minimum: 200 mm | Maximum: 200 mm | Set size: 200 mm | Extended description: Details at KGD01 System Konfig.png | Power requirements: 230 V 15.0 A 50 Hz
Regensburg, Germany- Regensburg, Germany
2000 WET Clean Strip (8''tool)
- Manufacturer: AP&S Customized Soln
WET Clean Strip (8''tool), Currently the tool still working. WET Clean Strip (8''tool)
Regensburg, Germany1999 WET Clean Strip (8''tool)
- Manufacturer: AP&S Customized Soln
WET Clean Strip (8''tool) WET Clean Strip (8''tool)
Regensburg, Germany1996 Tel MK7-S
- Manufacturer: Tokyo Electron - TEL
missing parts: 2 resist pumps, 1Developer Line Add. Info: TYP AM/C Typ FC-9801F#2SD/HD Typ CommandpostSystem Vers. MK8G2.38Alarm File ALM00166.OENSp. Al.File AL00TT.OENGEM 1.72Lines 1(3)Pumps 1xminiEBR programabl...
Regensburg, Germany1995 Tel MK7-S
- Manufacturer: Tokyo Electron - TEL
missing parts: 2 resist pumps, 1Developer Line Add. Info: TYP AM/C Typ FC-9801F#1SD/HD Typ CommandpostSystem Vers. MK8G2.38Alarm File ALM00166.OENSp. Al.File AL00TT.OENGEM 1.72Lines 1(3)Pumps 1xminiEBR programabl...
Regensburg, Germany1996 Canon 3000i4
- Manufacturer: Canon
Configuration: left inline system; 8" wafer chuck;Nikon Type Reticle changer; 6" Reticle major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-...
Regensburg, Germany2004 Accretech TSK
- Manufacturer: Accretech - Tokyo Seimitsu - TSK
UF200/UF200A Minimum: 150 mm | Maximum: 200 mm | Set size: 150 mm | Other information: Inserat aktualisiert 15 Anlagen - 3 Anlagen sind im Jänner 25 aus der Produktion genommen worden. | Extended description: Det...
Regensburg, Germany2011 PVA SPA Waferscale WS200 (MET902-01)
Waferscale for 8" Wafer STD + Taiko Wafer weighing system - Filmthickness
Regensburg, Germany