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H2,60SLM VCR Device name: Mass flow controller (MFC)
Air,200sccm,SW Device name: Mass flow controller
CF4,10sccm VCR Device name: Mass flow controller
N2, 50sccm Device name: Mass flow controller
Ar 100sccm Device name: Mass flow controller
Flow: 1 SLM Gas: H2 Device name: Mass flow controller (MFC)
Device name: Mass flow power supply
Year Marking: Specs:.
Device name: Mass flow controller (MFC)
Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)
Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)
Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan