Used automated in Tokyo, Japan

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400RC

Gas: CHF3 Flow: 100 CCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas:H2 Flow rate:3SLM Device name: Mass flow controller (MFC)

Tylan FC-260

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: NH3　Flow rate: 1 SLM Device name: Mass flow controller (MFC)

Tylan FM-861

Gas: O2 Flow rate: 20 SLM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: AR Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:5SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK3-K

Gas: SiH4 Flow: 2LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2 Flow: 3LM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

Gas: O2 Flow: 5 L.M Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-510A

Gas:N2 Flow rate:50LM Device name: Mass flow controller (MFC)