Used automated in Tokyo, Japan

Horiba Stec SEC-4400-MO

Gas: CHF3 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: SF6 Flow rate: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HCL Flow rate:100SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:5SLM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:SiCl4 Flow rate:300SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410LP

Gas: SiCl4 Flow: 300 CCM Device name: Mass flow controller (MFC)

Horiba Stec STEC SEC-4400RO

Gas: CI2 Flow: 50SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400R

Gas:CF4 Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec STEC SEC-4400MO

Gas: CF4 Flow: 300 SCCM Device name: Mass flow controller (MFC)