Used automated in Tokyo, Japan

MKS M100B00752CS1BV

Gas: H2 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Horiba Etech SEC-510-X

Gas O2 flow 20 LMW160 D31 H135 fitting Swagelock 1/4

Tylan FC-770AC

Flow rate 20 SCCM Gas Ar Device name: Mass flow controller

Tylan FC-260

Gas 5% SiH4/N2 flow rate 3 SLM W130 D25 H110 Device name: Mass flow controller

Horiba Stec SEC-7330M

Gas: B2H6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)

Horiba Stec SEF-1R

Gas N2 Flow 20SLMW110 D30 H65 Device name: Mass flow controller

Horiba Stec SEC-E4400-MO

Gas HCl Flow 1LMW135 D32 H130VA1F36 Device name: Mass flow controller

Horiba Tech SEC-500MK3

Gas O2 flow rate 10LMW150 D60 H180 Device name: Mass flow controller

HORIBA STEC SEC-4400MO-UC

Gas O2 flow 500CCMW125 D31 H127 Device name: Mass flow controller

Tylan FM-860

Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FC-860

Gas NH3 flow 500 SCCM W155 D33 H175 Device name: Mass flow controller

Tylan FC-781C

Gas N2 flow 50SLMW150 D40 H155 Device name: Mass flow controller

MKS 1480A-25077

N2 40sccm Device name: Mass flow controller (MFC)

MKS 649A-27650

Piping unit set, He＊10SCCM Device name: Mass flow controller (MFC)