Used automated in Tokyo, Japan

Tylan FC-781C

Gas O2 flow 20SLMW150 D40 H155 Device name: Mass flow controller

Tylan FC-780C

Gas SF6 flow rate 50 SCCM W135 D32 H123 Device name: Mass flow controller

Tylan FC-780C

Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FC-780

Gas HCl flow 500 SCCM W125 D34 H170 Device name: Mass flow controller

Tylan FC-761

Gas N2 Flow 10SLM W150 D40 H180 Device name: Mass flow controller

Tylan FC-760

Gas N2 flow 500 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FC-760

Gas N2 flow 500 SCCM W125 D33 H180 Device name: Mass flow controller

Tylan FC-260

Gas B2H6 flow 500 SCCM W130 D25 H110 Device name: Mass flow controller

Tylan FC-260

Gas PH3 flow 500 SCCM w130 D25 H110 Device name: Mass flow controller

Tylan FC-781

H2 2SLM Device name: Mass flow controller (MFC)

Lintec MC-100M

• Model: MC-100

Gas O2 Flow 500 SCCM W210 D40 H175 Device name: Mass flow controller

Rintek MC-2100MO

H2 2SLM Device name: Mass flow controller (MFC)

Yamatake Yamatake CMQ

• Manufacturer: Azbil - Yamatake

Air 200 ml/min Device name: Mass flow controller (MFC) | Remarks: Parts extraction

Millipore Mass Flow Controller (MFC)

• Manufacturer: Millipore

H2 Device name: Mass flow controller (MFC)

Millipore Mass Flow Controller (MFC)

• Manufacturer: Millipore

N2 Device name: Mass flow controller (MFC)