Used automated in Tokyo, Japan

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK3-K

Gas:N2O Flow:2LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410-UC

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410Z

Gas: SiH4 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

Gas: SF6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK2

Gas: CF4 Flow: 500 CCM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

Gas:N2 Flow rate:5LM Device name: Mass flow controller (MFC)

MKS M100B02852CS1BV

Gas: CH4 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

MKS M100B00752CS1BV

Gas: H2 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Horiba Etech SEC-510-X

Gas O2 flow 20 LMW160 D31 H135 fitting Swagelock 1/4

Tylan FC-770AC

Flow rate 20 SCCM Gas Ar Device name: Mass flow controller

Tylan FC-260

Gas 5% SiH4/N2 flow rate 3 SLM W130 D25 H110 Device name: Mass flow controller

Horiba Stec SEC-7330M

Gas: B2H6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)

Horiba Stec SEF-1R

Gas N2 Flow 20SLMW110 D30 H65 Device name: Mass flow controller