Used parallel robots

1996 Axcelis/ Eaton Nova NV 8200 Implanter

• Manufacturer: Axcelis

8" - Energy config.: from 3 to 250keV (single); up to 750 keV (triple) - Wafer size 200mm with holders for different wafers sizes - Dose: > 1E11at/cm² - Beam current: I < 1mA - Gas lines: - 4 process gas li...