Building Filters
1995 CDE CDE80/3 Plasma Etch
- Manufacturer: CDE
The system was in production until February 2025. Plasma Etch
Regensburg, Germany
2008 ASM Advance 400
- Manufacturer: ASM
- Model: ADVANCE 400
ASM Furnace Vertical - Advance 400 2 Reactor atmospheric Robot defect and need service
Regensburg, Germany
1995 Fusion Systems Inc. 200 PCU
- Manufacturer: Fusion Systems Inc.
Die Anlage war bis zur Deinstallation in Jänner 2024 in Produktion. FUSION 150/7D
Regensburg, Germany
2011 Mechatronics Inc TWH 001 06 11
- Manufacturer: Mechatronics Inc
Power requirements: 200-240 V 50/60 Hz 3 Phase | Weight: 1,213 lb (550 kg)
Regensburg, Germany
2013 Ismeca KGD01
- Manufacturer: Ismeca
KGD01 NX32W Minimum: 200 mm | Maximum: 200 mm | Set size: 200 mm | Extended description: Details at KGD01 System Konfig.png | Power requirements: 230 V 15.0 A 50 Hz
Regensburg, Germany
Regensburg, Germany
2000 WET Clean Strip (8''tool)
- Manufacturer: AP&S Customized Soln
WET Clean Strip (8''tool), Currently the tool still working. WET Clean Strip (8''tool)
Regensburg, Germany
1999 WET Clean Strip (8''tool)
- Manufacturer: AP&S Customized Soln
WET Clean Strip (8''tool) WET Clean Strip (8''tool)
Regensburg, Germany
1999 Tel Mercury
- Manufacturer: Tokyo Electron - TEL
Glass cleaning Width: 33.465 in (85.0 cm) | Depth: 52.992 in (134.6 cm) | Height: 39.764 in (101.0 cm)
Regensburg, Germany
2011 PVA SPA Waferscale WS200 (MET902-01)
Waferscale for 8" Wafer STD + Taiko Wafer weighing system - Filmthickness
Regensburg, Germany
2004 Canon LITVC1-02
- Manufacturer: Canon
TEL ACT12 - Double Block - 300mm + LITVC1-02 Canon FPA- 5500iZ+
Regensburg, Germany
Regensburg, Germany
Regensburg, Germany
Regensburg, Germany
2016 LAM Research Corp. WETV18-04
- Manufacturer: Lam Research - Novellus
SEZ 304 Minimum: 150 mm | Maximum: 300 mm | Set size: 300 mm | Number of robots: 1 | Tank material: PVDF | Automatic wafer transfer: YES | Controller type: Microprocessor Controller Type | Other information: the ...
Regensburg, Germany
