Used Etching Systems

Semitool Spectrum Frame

• Manufacturer: Semitool
• Model: Spectrum

Spray Solvent Stripper Sat 1 Module. Sat 2 Module

FSI Excalibur Anhydrous HF Vapor Etcher

• Manufacturer: FSI

FSI Excalibur Anhydrous HF Vapor Etcher Available October 2016

LAM 9600 Etcher for sale USA

• Manufacturer: Lam Research - Novellus
• Model: 9600

LAM 9600 Etcher Classic software, clamped chuck The tools are in excellent shape and currently running production in USA. Contact:

Tegal 903e Plasma Etchers

• Manufacturer: Tegal

Hitachi M-501A Etcher 2 x sets

• Manufacturer: Hitachi
• Model: M-501A

Hitachi M-501A Etcher (2 x sets) Plasma Etcher Please contact:

Semitool Spectrum 8inch

• Manufacturer: Semitool
• Model: Spectrum

Still installed in Cleanroom The system is a solvent strip tool. It consists of a cassette loading (WIP) area where multiplke cassettes may be placed. The WIP (loading area) consists of two main components, the I...

Hitachi M-602A

• Manufacturer: Hitachi
• Model: M-602A

Hitachi M-602A Please contact:

AMAT P5K Oxide Etcher

• Manufacturer: Amat

AMAT P5K Oxide Etcher Please contact:

Tegal CD1151-00102 Plasma Etcher

• Manufacturer: Tegal

Rena Casstte Spray Etcher

• Manufacturer: Rena

150mm (without Semitool SRD)

ICP Etch

• Manufacturer: Unknown

STS ICP

ICP Etch

• Manufacturer: Unknown

STS ICP

Lam Aluminum Etching System

• Manufacturer: Unknown

Lam Aluminum Etching System Aluminum Etching System

Polysilicone Etch

• Manufacturer: Unknown

Tool will be removed to a storage room from clean room on January 6th, 2015. Three chambers (A, B and D) were transferred to another Fab and are not available. Confirmed with Fab 15 there are missing & broken par...

Mega Kinetics Chemical Delivery System for Electo Plate Etch tools

• Manufacturer: Unknown

Mega Kinetics Chemical Delivery System for Electo Plate / Etch tools Chemical Delivery System for Electo Plate / Etch tools