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Tepla 600-AL (autoload) plasma asher for 200mm wafers with ENI 13.56mHz Rf generator
- Manufacturer: ENI
TEPLA 600 PLASMA ASHER consisting of: - Model: 600 SemiAuto - Semi-Automatic RF Plasma System - Can process up to 200mm wafers - Used for photoresist stripping and surface cleaning, as well as etching silicon an...