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  • 2003 Peter Wolters AG PM300 Apollo Peter Wolters

    No price - Regensburg, Germany
    • Manufacturer: Peter Wolters AG

    300mm;two side / chambers; dry in dry out; 2 step polishing; with touch-up platen; polishing head: wafer diameter 300 mm; rotating speed 0 - 125 rpm; backside pressure 0 - 200 kpa; polishing downfo...

  • 1995 IPEC/Westech AVANTI 472 Westech

    No price - Regensburg, Germany
    • Manufacturer: IPEC/Westech

    200 wafer size single wafer polishing; polish arm/wafer carrier; load/unload station; primary/final polish table (22.5"/20.625"); carrier clean station; app1000 pad conditioner; adjustable paramete...

  • 1996 IPEC/Westech AVANTI 472 Westech

    No price - Regensburg, Germany
    • Manufacturer: IPEC/Westech

    200 wafer size single wafer polishing; polish arm/wafer carrier; load/unload station; primary/final polish table (22.5"/20.625"); carrier clean station; app1000 pad conditioner; adjustable paramete...