Building Filters
- Yongin-si, South Korea
1996 Ohkura Electric FA3000
- Manufacturer: Ohkura Electric
Data strage & machine control system (for horizontal furnace)
Yongin-si, South Korea1997 Ohkura Electric FA3000
- Manufacturer: Ohkura Electric
Data strage & machine control system (for vertical furnace)
Yongin-si, South KoreaAG Associates 610
- Manufacturer: AG Associates
- Model: 610
Benchtop Rapid Thermal Anneal Tool with Gas Control Box
Yongin-si, South KoreaKLA Tencor 8100
- Manufacturer: KLA-Tencor
- Model: 8100
MAC controller, 100nm feature size, 4.5nm res, 4"-8", 40wfs/hr
Yongin-si, South KoreaKLA Tencor 8100E
- Manufacturer: KLA-Tencor
MAC controller, 30nm feature size, 4.5nm res, 4"-8", 40wfs/hr
Yongin-si, South KoreaSemitool 870S SRD
- Manufacturer: Semitool
- Model: SRD-870S
6"/150mm Wafer Capable, PSC-102 Controllers, Single Bolt Rotor Design
Yongin-si, South KoreaKLA Tencor 8250/8300/8450
- Manufacturer: KLA-Tencor
Win NT controller, 30nm feature size, 4.0nm res, 4"-8", 55wfs/hr
Yongin-si, South KoreaKLA Tencor 8100XP/8100XPR
- Manufacturer: KLA-Tencor
Win NT controller, 30nm feature size, 4.0nm res, 4"-8", 50wfs/hr
Yongin-si, South KoreaAMAT Centura 5200 RTP
- Manufacturer: Amat
- Model: Centura
Narrow Body Loadlock Chamber / RTP XE Chamber * 2 / HP+ Robot / System Controller / AC Power Box
Yongin-si, South KoreaTEL Alpha 8S
- Manufacturer: Tokyo Electron - TEL
- Model: ALPHA 8S
Vertical LP-CVD System NIT Furnace / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker
Yongin-si, South KoreaTEL Alpha 8S
- Manufacturer: Tokyo Electron - TEL
- Model: ALPHA 8S
Vertical AP System ALPHA-8S ( N2 L/L ) / CAP OX ( TEOS) / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation
Yongin-si, South KoreaAMAT Centura 5200
- Manufacturer: Amat
- Model: Centura
WxZ process Narrow Body Loadlock / WxZ process Chamber 4 / MS Cooldown / HP Robot / System Controller/AC Power Box / RF Generator Rack (2MT501)
Yongin-si, South KoreaTEL Alpha 8S
- Manufacturer: Tokyo Electron - TEL
- Model: ALPHA 8S
Vertical AP System ALPHA-8S Alloy Furnace / Main System / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker
Yongin-si, South KoreaTEL Alpha 8S
- Manufacturer: Tokyo Electron - TEL
- Model: ALPHA 8S
Vertical AP-System Trans-LC , non N2 load lock / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker
Yongin-si, South Korea