Used etching

Tepla 600-AL (autoload) plasma asher for 200mm wafers with ENI 13.56mHz Rf generator

• Manufacturer: ENI

TEPLA 600 PLASMA ASHER consisting of: - Model: 600 SemiAuto - Semi-Automatic RF Plasma System - Can process up to 200mm wafers - Used for photoresist stripping and surface cleaning, as well as etching silicon an...

PlasmaFinish V55-G plasma system

Vacuum chamber 340 x 400 x 450mm Door with auto unlock feature after end of process Microwave excitation 2.45GHz magnetron, maximum adjusted power 1200W 3 gas channels with Brooks MFC: N2, Ar, O2 Pfeiffer DUO...

PlasmaFinish V55-G Microwave ashing system

Vacuum chamber 340 x 400 x 450mm Door with auto unlock feature after end of process Microwave excitation 2.45GHz magnetron, maximum adjusted power 1200W 3 gas channels with Brooks MFC: N2, Ar, O2 Power req. 1...

Samco UV-660 Ozone Stripper

• Manufacturer: Samco
• Model: UV-660

UV ozone stripper/cleaner for removing organic materials ie. solvent residues, photoresist, inks, or polyimides. Substrates are processed using UV light, ozone, and heat. Tools can process 4 x 6" wafers or 1 pane...

PVA Tepla 9204 (FORMERLY GASONICS) plasma asher with 4 gas channels

• Manufacturer: GaSonics

208v, 3 phase, 50/60hz, 20 amps Exceptional condition: Quartz barrel shows no sign of etching or use 12"(dia) x 20"(D) quartz barrel Seren 600 watt Rf power supply 13.56mhz External wall mounted power distrib...

Gasonics 9104 plasma asher (never installed with new control box)

• Manufacturer: GaSonics
• Model: 9104

Features and Specifications Gasonics/IPC 9104 Ash/Etch system 12"(dia) x 20"(D) quartz barrel soft pumping and purge valving low particulate design 2ea mass flow gas inputs with VCR fittings all SS plumbing, mul...

Henniker HPT200 Plasma System with single gas MFC and 150mm ID chamber

The HPT-200 is a microprocessor controlled benchtop plasma treatment systems that is ideally suited to surface activation, cleaning and modification of a wide range of materials including polymers, metals, glass ...

Yield Engineering R3 Plasma Cleaner with 500w power supply @ 50Khz

• Manufacturer: Yield Engineering
• Model: R3

Plasma cleaner for hybrid devices microprocessor control with multi program capability down stream design for better uniformity 2 pull out shelves each 12.75"x12.75" three gas inputs each with needle valve fl...

March PX1000 Plasma Asher with ENI 1200W RF generator

• Manufacturer: March Instruments
• Model: PX-1000

ENI ACG10B 1200W Rf 13.56mhz generator 2 powered shelves Porter Masss flow controllers: 1000 SCCM N2 500 SCCM N2

Diener FEMTO SRS Plasma asher (2014) with Pfeiffer DUO 1.7cfm vacuum pump

• Manufacturer: Pfeiffer

Femto | plasma cleaner Generator: 13,56 MHz / 0-50 W Vacuum pump: Pfeiffer DUO Controls: Type A Semi-automatic pump, gas flow, plasma process, venting have to be initiated manually Selectable parameters: pro...

Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher

• Manufacturer: Yield Engineering
• Model: R3

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort. 3 plasma modes: Active Plasma for routine cleaning of sample surf...

Hitachi M-501 Etching System

• Manufacturer: Hitachi
• Model: M-501

Good condition Hitachi M-501 Etching Systems. Located in South Korea and other countries. Click request price for more information.