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TEL Unity II 85 TPA
- Manufacturer: Tokyo Electron - TEL
Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) Daihen RF Generator / Two(2) Daihen Automation Matching Network / Two(2) SM...
Yongin-si, South KoreaNOVELLUS EFEM
- Manufacturer: Lam Research - Novellus
Novellus INVOA NEXT 300mm CU B/S, EFEM - LOAD PORT 3 FOUP - primary User Interface Location : Right with KeyBoard and mouse, and monitor. - Primary User Interface Configuration : Clean Room wall Interface. - Wafe...
Gyeonggi-do, South Korea