Used Mass Flow Controllers in Tokyo, Japan

Tylan FC-780C

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400R

• Manufacturer: Horiba

Gas: O2 Flow rate: 10000 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410NC

• Manufacturer: Horiba

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421Z

• Manufacturer: Horiba

Gas: N2 Flow: 5 L/min Device name: Mass flow controller (MFC)

Edwards 825

Gas Ar flow rate 50 SCCM W130 D25 H160 Device name: Mass flow controller

Horiba Stec SEC-7440MC

Gas WF6 Flow 100 SCCM W133 D31 H127 Device name: Mass flow controller

Horiba Stec SEC-4400RO

Gas O2 Flow 500 SCCM W230 D45 H140 Device name: Mass flow controller

Horiba Tech SEC-500MK3

• Manufacturer: Horiba

Gas H2 flow rate 10lMW150 D60 H180 Device name: Mass flow controller

Tylan FC-860

Gas NH3 flow 500 SCCM W155 D33 H175 Device name: Mass flow controller

Tylan FC-780C

Gas NH3 Flow 500 SCCM W125 D33 H150 Device name: Mass flow controller

Tylan FC-761

Gas N2 Flow 10SLM W150 D40 H180 Device name: Mass flow controller

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4401M

Gas: CH3OH Flow rate: 100 CCM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas CHF3 Flow rate 100 SCCM W150 D40 H180 Device name: Mass flow controller