Used Etching Systems

200mm Oxide etcher Canon-ANELVA ILD-4100SR

• used

• Manufacturer: Anelva

200mm Oxide etcher – Canon-ANELVA ‘ILD-4100SR’

SEZ Backside Etcher

• used

• Manufacturer: Unknown

SEZ Backside Etcher Backside Etcher

LAM 490 Etcher

• used

• Manufacturer: Lam Research - Novellus

Fully Rebuilt by Aspect systems. 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

TRION Minilock single wafer RIE Etcher

• used

• Manufacturer: Trion
• Model: MINILOCK

Single Wafer RIE Etcher with Loadlock, 200mm Wafers

Etcher Inner Gate Valve Drive

• used

• Manufacturer: Lam Research - Novellus

1998 Ulvac NE-700

• used

• Manufacturer: Ulvac

Dry Etching System, Maker Ulvac, Model NE-700, S/N MV97-1005, Year 1998;

2016 SPTS Technologies APM-011

• used

• Manufacturer: SPTS

InP ICP Etcher, Maker SPTS Technologies, Model APM-011, S/N CP0226, Year 2016;

Etcher Equipment

• used

Etcher Equipment including: Clean Etcher, Maker Tokyo OHKA, Model TCE-2400, S/N T-9102171, Year 1991; Reactive Ion Etching, Maker LeadingEdge, Quantity 2; Microwave Etcher System, Maker Canon;

2005 TEL SCCM-SHIN

• used

• Manufacturer: Tokyo Electron - TEL

De-installed, Warehoused, Can be inspected Wafer size: 300MM

2011 TEL Telius SCCM Jin

• used

• Manufacturer: Tokyo Electron - TEL

De-installed, Warehoused, Can be inspected Wafer size: 300MM

2008 AMAT DPS G5

• used

• Manufacturer: Amat
• Model: DPS G5

De-installed, Warehoused, Can be inspected Wafer size: 300MM

2008 AMAT E MAX CT+

• used

• Manufacturer: Amat

De-installed, Warehoused, Can be inspected Wafer size: 300MM

2015 LAM 2300 E5 KIYO EXP

• used

• Manufacturer: Lam Research - Novellus

De-installed, Warehoused, Can be inspected Wafer size: 300MM

2014 LAM 2300 E5 KIYO45

• used

• Manufacturer: Lam Research - Novellus

De-installed, Warehoused, Can be inspected Wafer size: 300MM