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2016 KLA-Tencor BF2905 (Optical broadband plasma wafer defect inspectors)
used
- Manufacturer: KLA-Tencor
Installation date: 2016 Down date: 2020 Still installed in Clean room Problem discription: The tool failed optics qualification due to dead channel on CPC0. Compared CPC-0 with CPC-1 and confirmed during TDI ...
Singapore