Used Mass Flow Controllers

Horiba Stec SEC-400MK2

Gas CH4 Flow 200 SCCM W230 D25 H155 Device name: Mass flow controller

Horiba Stec SEC-4400M

Gas NF3 Flow 300 SCCM W125 D31 H127 Device name: Mass flow controller

Tylan FC-760

Gas N2 flow 500 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FM-860

Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FM-860

Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller

Tylan FC-770AC

Gas CF4 flow rate 200 SCCM W130 D32 H127 Device name: Mass flow controller

Yamatake Yamatake CMQ

• Manufacturer: Azbil - Yamatake

Air 200 ml/min Device name: Mass flow controller (MFC) | Remarks: Parts extraction

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:HBr Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400M

Gas:HCI Flow rate:2SLM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HCL Flow rate:100SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:N2 Flow rate:1LM Device name: Mass flow controller (MFC)

Tylan FC-781C

Gas:H2 Flow rate:10SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400-MO

Gas: CHF3 Flow: 100 SCCM Device name: Mass flow controller (MFC)